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Measuring and control systems
F-CUP
Faraday probe for monitoring and measuring ion beam parameters
Aperture: 1.5-2 mm
Measured current: 0.05–10 mA/cm2
Maximum ion energy: 1500 V
Designed to measure ion current density and ion energy spectrum in ion beam processing
PIEZO-01
Automatic quartz control system for coating thickness and growth rate
Operating frequencies:
Measurement accuracy: 1 nm
Allows you to monitor the growth rate and thickness of the deposited coating with an accuracy of up to 1 nm.
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