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Vacuum Process Equipment
Equipment for vacuum coating, surface activation and modification, plasma and ion-beam treatment
Technological devices for Ion-plasma processing
The main components of technological vacuum equipment: ion sources for sputtering and assisting, inductively and capacitively coupled plasma source, electron sources.
Plasma Power Products
RF power supplies, Automated impedance matching networks and Power distribution units (PDUs).
Sence and Measurement
Devices for measuring and controlling parameters of technological processes and equipment
Components for vacuum process devices
Quartz, ceramic and other unique parts of technological devices and equipment.
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