Ceramic parts

Ceramic components of vacuum process devices

Material: Al2O3,

Application temperature up to 1650 degC

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Ion-optical systems

Ion-optical systems (IOS) for ion sources

Aperture diameter: 100, 140, 200, 250, 300 mm;

Material: molybdenum, titanium, graphite;

Focal length: -1000 - +1000 mm;

Ion-optical systems (IOS) for ion sources ION-BREEZE and ION-TYPHOON. It is possible to manufacture ion-optical systems or grids separately for ion sources of other manufacturers. Manufacturing of IOS with one or several focal lengths, from titanium, molybdenum, tantalum.

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Quartz reactors

Quartz discharge reactors and other quartz glass products

Quartz reactors for ion sources of the ION-BREEZE and ION-TYPHOON series

High quality quartz glass products for our devices or made according to your drawings

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Vacuum and air capacitors

Variable and fixed high frequency capacitors

Working power: 30W - 1000 kW

Variable and constant vacuum ceramic capacitors.

Capacitance in the range from tens to thousands of pico Farads. Operating voltage from 1.5 kV to 45 kV.

Working current from 15 to 1000 A.

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