Ion cleaning
ION-BREEZE
High-frequency single-grid ion source with self-neutralizing ion beam
Description
The ION BREEZE is a high-frequency ion source with a single-grid ion-optical system, designed for ion beam-assisted deposition (IBAD), plasma etching, surface cleaning, plasma-chemical etching, and sputtering applications.
It generates a self-neutralized (space-charge-compensated) ion beam with an adjustable ion current density of 0.5–6 mA/cm² and ion energy ranging from 10 to 220 eV. The system operates on the principle of inductive RF discharge, ensuring stable and contamination-free plasma generation.
The main advantages
- Self-neutralizing ion beam – Eliminates the need for an external neutralizer, simplifying system integration;
- High ion current density;
- Flexible ion energy control;
- Low contamination – Minimized impurity introduction to the substrate.
- Integrated auto-matching unit;
- Easy setup via wired interface.